Measuring sensor

Abstract

The hermetically sealed measuring sensor includes a monolithic proof body (1) having at its ends a first (2) and a second (3) non-deformable parts connected together by a central part designed as a deformable parallelogram. This central part of the proof body (1) has two through openings (6, 7) defining between them a main beam (10) of which at least one end is joined via a connecting section (13) to a measuring beam (12) which forms one piece with a non-deformable part (2, 3) of the proof body, but is uncoupled mechanically from the same. At least one of the non-deformable parts (2, 3) of the proof body has at least one cavity (4, 4′, 22) of which one wall is formed by the measuring beam (12) and by two membranes (15) situated one on each side of this measuring beam (12). Strain gauges (17) are fixed inside the cavity (4) on the back of the measuring beam (12) and the cavity (4) is closed by a cover (20) which is welded, bonded, or fixed tightly to the corresponding non-deformable part (2, 3) of the proof body.

Dependencies are inferred from the claim text.