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US 2003/0110865 A1Published application
Method of producing an integrated reference pressure sensor element
AssigneeMKS Instruments, Inc.
InventorSTAFFAN JOHSSON
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AssigneeMKS Instruments, Inc.
InventorSTAFFAN JOHSSON
Estimating the term…
A compact pressure sensor of capacitive type includes a pressure sensor housing assembly, which contains a reference cavity in which a high vacuum exists and which has a minimum volume. The pressure sensor housing comprises an upper base plate, a thinner shielding plate and a movable diaphragm, and a small cavity formed between the shielding plate and movable diaphragm. A narrow channel extends from the cavity to the outside and they form a reference cavity. At the mouth of the channel a recess is provided containing an elastically mounted getter body which is capable of being thermally activated, so that a portion of the surface of the getter body is a wall surface in the reference cavity. A closing lid having a low projecting profile is placed in a gastight way in the recess and engages the getter body. When simultaneously closing the reference cavity and activating the getter body, the lid is attached to a heating probe at a distance from the sensor housing and the getter body is placed in the recess. The whole assembly is placed in a vacuum chamber and the temperature is then increased to the temperature, at which the getter starts to be activated, and thereupon the probe is moved to a position in which the closing lid is in contact with the getter body but not tightly to the sensor housing. The temperature of the probe is increased in order to melt the joint material on the lid, heat then being conducted through the lid to the getter body, and thereupon the lid is tightly attached to the housing and is fixed in this position.
A method of producing a pressure sensor comprising a pressure sensor house assembly which contains a reference cavity, in which a vacuum exists, and furthermore comprising a getter capable of being thermally activated, characterized in that the getter is activated by conducting heat from an exterior heated body, which is made to come in contact with a getter and is then removed.
A method of producing a pressure sensor comprising a pressure sensor housing assembly containing a reference cavity, in which a vacuum exists, and furthermore comprising a getter which is capable of being thermally activated and a connection to the outside which can be closed, characterized in that air is pumped out of the reference cavity and that then the connection is closed by a lid and the getter then is activated by conducting heat from the lid.
A method of producing a pressure sensor comprising a pressure sensor house assembly containing a reference cavity, in which a vacuum exists, characterized in
A method of producing a pressure sensor including a pressure sensor house assembly comprising a reference cavity, in which a vacuum exists, characterized in
A pressure sensor comprising a pressure sensor house assembly of substantially ceramic material containing a reference cavity, in which a vacuum exists, characterized by a single closing channel, which is a part of the reference cavity and extends from a main portion thereof to a single closing lid, by means of which the reference cavity is closed.
A pressure sensor including a pressure sensor house assembly containing a reference cavity, in which a vacuum exists, and further comprising a thermally activated getter body, characterized by a spring, which is arranged to act on the getter body, whereby the getter body is elastically arranged in a portion of the reference cavity, so that it is free to move and can absorb heat stresses.
Dependencies are inferred from the claim text.