Wafer handling device and method for testing wafers
OwnerOlivier Vatel, Iraj Shahvandi +3inventors
InventorsOlivier Vatel, Iraj Shahvandi, Dirk Aderhold, Peggy John, Ralf Zedlitz
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Abstract
A wafer handling device comprises metrology equipment (410, 420, 430, 440, 450, 460) for testing selected wafers as well as a stationary wafer storage system (300). The stationary wafer storage system (300) has a buffer (310) to store wafers and a load-and-unload station (320) to transfer selected wafers between the buffer (310) and wafer transport means (330). The wafer transport means are provided for transferring selected wafers between the load-and-unload station (320) and the metrology equipment (410, 420, 430, 440, 450, 460).
Claims14
A wafer handling device, comprising:
- metrology equipment for testing selected wafers, and a stationary wafer storage system, said stationary wafer storage system having a buffer for storing a plurality of wafers and at least a load-and-unload station for transferring said selected wafers between said buffer and wafer transport means, wherein said wafer transport means are provided for transferring one or more of said selected wafers between said load-and-unload station and said metrology equipment.
A method for testing wafers, comprising the following steps:
- a) selecting wafers to be tested from a plurality of wafers stored in a stationary storage system;
- b) transferring at least some of said wafers to be tested from said stationary storage system to wafer transport means via a load-and-unload station assigned to said stationary storage system;
- and
- c) transferring at least some of said wafers to be tested to metrology equipment by said wafer transport means and performing at least one test step.
Dependencies are inferred from the claim text.