Ink jet recording head, method for manufacturing the same and ink jet recording apparatus

Abstract

A method for manufacturing an ink jet recording head of a type having a plurality of pressure chambers communicating with an ink chamber and arrayed two-dimensionally, and a plurality of piezoelectric elements driving the pressure chambers, respectively, the piezoelectric elements being actuated to apply pressure to ink in the pressure chambers and thereby eject ink droplets from nozzles communicating with the pressure chambers, respectively, the manufacturing method includes the steps of patterning a piezoelectric plate releasably bonded to a substrate, forming a piezoelectric element unit in which a plurality of piezoelectric elements are arrayed two-dimensionally on the substrate, bonding the piezoelectric elements of the piezoelectric element unit to a diaphragm plate; and then releasing the substrate from the piezoelectric elements.

Dependencies are inferred from the claim text.