Ink-jet printhead and method of manufacturing the same

An ink-jet printerhead, comprising:

• a substrate having a passage formed in said substrate;
• a heater formed on a top surface of said substrate;
• a nozzle plate having a nozzle;
• and
• a barrier disposed between said top surface of said substrate and said nozzle plate to define an ink chamber communicating said passage and said nozzle.

An ink-jet printhead, comprising:

• a substrate;
• a nozzle plate having a nozzle;
• a heater disposed between said nozzle plate and said substrate;
• a narrow passage formed in said substrate, communicating with said nozzle and said heater;
• and
• a wide passage formed in said substrate opposite to said narrow passage, said wide passage communicating with said narrow passage and wider than said narrow passage, wherein said wide passage, said narrow passage, and said nozzle have concentric axes.

A method of manufacturing an ink-jet printhead, comprising forming an insulation film on a substrate;

• depositing a metal layer onto said insulation film and patterning said metal layer to form a heater;
• forming an electrical wire on said substrate;
• etching said substrate at a predetermined depth from a top surface of said substrate in a direction perpendicular to a major surface of said heater to form a narrow passage;
• depositing an ink chamber barrier layer on said top surface of said substrate and patterning said ink chamber barrier layer to form an ink chamber enclosing said heater;
• stacking a nozzle plate having a nozzle on said ink chamber barrier layer and disposed on an upper portion of said ink chamber barrier layer, and applying predetermined pressure and temperature onto said nozzle plate to bond said nozzle plate and said substrate;
• and
• etching said substrate from a bottom surface thereof to form a wide passage communicating with said narrow passage.

A method of manufacturing an ink-jet printhead, comprising:

• forming an insulation film onto a substrate;
• depositing a metal layer onto the insulation film and patterning said metal layer to form a heater;
• forming an electrical wire on said substrate;
• etching said substrate to form a narrow passage;
• depositing an ink chamber barrier layer onto said top surface of said substrate and patterning said ink chamber barrier layer to form an ink chamber enclosing said heater, said ink chamber communicating with said passage;
• and
• stacking a nozzle plate having a nozzle on said ink chamber barrier layer and applying predetermined pressure and temperature to said nozzle plate to bond said nozzle plate and said substrate wide passage communicating with said narrow passage.

A method of manufacturing an ink-jet printerhead, comprising:

• providing a substrate;
• forming an insulation layer on said substrate;
• forming a heater on a first portion of a top surface of said insulation layer, said heater having an opening;
• forming a wire on a second portion of said top surface of said insulation layer, said wire coupled to said heater;
• placing a barrier on said wire and a third portion of said top surface other than said heater and said opening;
• and
• stacking a nozzle plate having a nozzle on said barrier.

A method of manufacturing an ink-jet printerhead, comprising:

• providing a substrate;
• forming a heater on a first portion of a top surface of said substrate, said heater having an opening;
• forming a wire on a second portion of said top surface, said wire connected to said heater;
• placing a barrier on said wire and a third portion of said top surface other than said heater and said opening;
• and
• stacking a nozzle plate having a nozzle on said barrier.