Fabrication approaches for the formation of planar inductors and transformers
OwnerMark D. Fontanella, Paul Greiff +2inventors
InventorsMark D. Fontanella, Paul Greiff, Donato Cardarelli, Joseph G. Walsh
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Abstract
This invention relates to the fabrication of planar inductive components whereby the design in cross-section describes a conductor surrounded by magnetic material along the length of the conductor; an electrical insulator is placed between the conductor and the magnetic material. Cases also apply where more than one independent conductor is used. The planar form allows integration of inductive components with integrated circuits. These inductive components can be embedded in other materials. They can also be fabricated directly onto parts.
Claims49
A method of fabricating an embedded planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing a substrate defining first and second surfaces;
- creating one or more spaced, elongated conductive pads on one surface of the substrate;
- overlaying the pads and at least part of the one substrate surface with a first insulating layer;
- overlaying the first insulator layer with a first layer of magnetic material;
- depositing a second insulating layer on at least part of the other surface of the substrate;
- creating parallel, spaced, elongated, magnetic material deposition channels through spaced portions of the second insulating layer and through the underlying substrate and first insulating layer, ending at the first layer of magnetic material, with one channel on each side of and spaced from a pad;
- creating another parallel channel through the second insulating layer over and extending to an underlying conductive pad;
- filling the magnetic material channels with the magnetic material;
- filling the channel extending to the conductive pad with conductive material, to form the winding, the winding having an exposed surface;
- creating an insulator parallel to and between the winding and the magnetic material channels;
- overlaying at least the exposed surface of the winding with the insulator to form a third insulating layer;
- and
- overlaying at least the third insulating layer and the magnetic material in the magnetic material channels with a second layer of magnetic material that is in contact with the magnetic material in the magnetic material channels, to form the magnetic core.
A method of fabricating an embedded planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing a substrate defining first and second surfaces;
- creating one or more spaced, elongated conductive pads on one surface of the substrate;
- overlaying the pads and at least part of the one substrate surface with a first insulating layer;
- overlaying the first insulator layer with a first layer of magnetic material;
- depositing a second insulating layer on at least part of the other surface of the substrate;
- creating parallel, spaced, elongated first deposition channels through spaced portions of the second insulating layer and through the underlying substrate and the first insulating layer, ending at the first layer of magnetic material, with one channel on each side of and spaced from a pad;
- creating another parallel channel through the second insulating layer over and extending to an underlying conductive pad;
- filling the channel extending to the conductive pad with conductive material, to form the winding, the winding having an exposed surface;
- overlaying onto the exposed surface of the winding, and depositing into the deposition channels, an insulator;
- creating through the middle of the deposited insulator in the first deposition channels, a narrower magnetic material deposition channel extending to the first layer of magnetic material, to leave the first deposition channels lined with insulator that, along with the insulator overlaying the exposed surface of the winding, forms a third insulating layer;
- and
- conformally coating at least the second insulating layer with a second layer of magnetic material that is in contact with the first layer of magnetic material, to form the magnetic core.
A method of fabricating a planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing a component support member defining a non-magnetic top surface;
- sequentially overlaying at least part of the top surface of the support member with a first layer of magnetic material, a first layer of insulating material, and a layer of conductive material;
- removing portions of the conductive material layer down to the underlying insulating material to leave the inductive component winding;
- overlaying the exposed first layer of insulating material and the winding with a second layer of insulating material;
- creating spaced, elongated, parallel deposition channels through both layers of insulating material to the underlying first layer of magnetic material, the deposition channels on opposite sides of and spaced from the winding;
- and
- overlaying the exposed insulating material and the exposed first layer of magnetic material with magnetic material, to complete the magnetic core.
A method of fabricating a planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing a first layer of magnetic material covered by a first layer of insulating material, covered by a conductor layer, covered by a second layer of insulating material, covered by a second layer of magnetic material;
- creating parallel, spaced elongated first deposition channels through the second layers of magnetic material and insulating material, the conductor layer and the first layer of insulating material, ending at the lower magnetic layer;
- depositing into the first channels an insulating material;
- creating through the middle of the deposited insulating material in the first channels, narrower magnetic material deposition channels extending through the entire deposited insulating material thickness to the lower layer of magnetic material, to leave the first channels lined with insulating material, and expose the lower layer of magnetic material;
- and
- overlaying the magnetic material deposition channels and the exposed lower layer of magnetic material with magnetic material, to complete the magnetic core.
A method of fabricating a planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing a substrate covered by an upper magnetic material layer, covered by the winding encapsulated along its length with an insulating material to create an intermediate with an exposed insulating surface;
- creating parallel, spaced, elongated deposition channels through the insulating material to the underlying magnetic material layer, the deposition channels on opposite sides of and spaced from the winding;
- and
- overlaying the exposed insulating material and the exposed underlying magnetic material layer with magnetic material, to complete the magnetic core.
A method of fabricating a planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing an intermediate comprising a conductive layer in contact with an insulating material layer overlaid with a layer of magnetic material defining a series of elongated, spaced gaps through to the insulating material layer;
- creating a series of parallel channels from the gaps, through the adjacent insulating material layer, to the adjacent winding layer;
- depositing magnetic material into the channels;
- removing portions of the winding layer aligned with the filled channels to leave an exposed surface comprising the one or more windings, each winding spaced from channels on either side of the winding;
- overlaying on the exposed surface an insulating material, leaving the magnetic material in the channels uncovered;
- and
- overlaying magnetic material on the insulating material on the exposed surface, and on the uncovered magnetic material in the channels, to complete the magnetic core.
A method of fabricating a planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing a supportive substrate;
- defining an elongated channel in a surface of the substrate;
- lining the channel with an insulator;
- filling the lined channel with a conductor to create the winding;
- creating on at least part of the substrate surface over the winding, a layer of insulating material, to surround the winding with an insulator;
- creating parallel, elongated, spaced deposition channels through the insulating layer and spaced on either side of the winding, the channels extending into the substrate and completely under the winding, while providing spaced supports from the substrate to the insulator;
- and
- depositing completely surrounding the winding and its surrounding insulating layer, a layer of magnetic material, to form the magnetic core.
A method of fabricating a planar inductive component having one or more conductive windings, a magnetic core co-linear with and surrounding all windings, and an insulator separating each winding from any other winding and from the magnetic core, the method comprising:
- providing an intermediate comprising the winding encapsulated along its length by an insulator;
- creating parallel, spaced, elongated deposition channels in the insulator on each side of and spaced from the winding;
- and
- depositing into the channels a magnetic material, to form at least part of the magnetic core.
Dependencies are inferred from the claim text.