Capacitance position sensor and position controller equipped with the sensor

Abstract

A capacitance position sensor comprises a pair of opposed tabular electrodes, an LC oscillator circuit having a toroidal core winding and whose oscillating frequency varies with change in capacitance between the pair of electrodes, and an arithmetic processing unit for calculating an absolute value of a distance between the electrodes from the oscillating frequency of the oscillator circuit. A position controller comprises a stationary member formed with one electrode of the pair of electrodes of the position sensor, a movable member on which the other electrode of the pair of electrodes is formed, and moving means for moving the movable member relative to the stationary member.

Dependencies are inferred from the claim text.