Apparatus and method for manufacturing semiconductor grains
AssigneeKYOCERA Corporation
InventorsNobuyuki Kitahara, Toshio Suzuki, Noboru Suda, Shin Sugawara, Hisao Arimune
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Abstract
A crucible is formed of a cylindrical body member and a disk-shaped nozzle member fitted to the bottom portion of the body member, and the nozzle member is provided with a nozzle hole for discharging out a semiconductor molten solution dropwise therethrough. The semiconductor molten solution drops discharged out of the crucible through the nozzle hole are cooled and solidified during falling to become semiconductor grains. Silicon grains having high crystal quality can be manufactured at low cost.
Claims26
An apparatus for manufacturing semiconductor grains by discharging out a semiconductor molten solution through a nozzle hole of a crucible to allow the same to fall dropwise, the crucible including a cylindrical body member and a disk-shaped nozzle member disposed at the bottom portion of the cylindrical body member, the nozzle member being provided with the nozzle hole for discharging the semiconductor molten solution dropwise therefrom.
A method for manufacturing semiconductor grains comprising steps of filling a semiconductor molten solution into a crucible having a cylindrical body member and a disk-shaped nozzle member fitted to the bottom portion of the body member, applying a pressure to the semiconductor molten solution in the crucible, discharging out dropwise the semiconductor molten solution through a nozzle hole provided in the nozzle member, allowing the semiconductor molten solution to fall to cool and solidify the semiconductor molten solution during falling.
A method for manufacturing semiconductor grains comprising steps of adding grains acting as cores of crystal to a semiconductor material, filling a semiconductor molten material of the semiconductor material into a crucible, discharging out the semiconductor molten solution dropwise through a nozzle hole provided in the crucible to allow the semiconductor molten material to fall, and cooling and solidifying the molten material during falling.
In an apparatus for manufacturing semiconductor grains by discharging out a semiconductor molten solution through a nozzle hole of a crucible to allow the same to fall dropwise,
- an apparatus for manufacturing semiconductor grains in which a surface layer of silicon carbide is formed on the inner wall surface of the crucible.
In an apparatus for manufacturing semiconductor grains by discharging out a semiconductor molten solution through a nozzle hole of a crucible to allow the same to fall dropwise,
- an apparatus for manufacturing semiconductor grains in which the crucible is formed of sintered graphite, and formed on the inner wall surface of the crucible is an amorphous carbon layer.
A method for manufacturing semiconductor grains comprising steps of feeding a semiconductor molten material into a crucible, discharging out dropwise the semiconductor molten solution through a nozzle hole provided in the crucible to allow the semiconductor molten material to fall in an atmosphere containing oxygen, and cooling and solidifying the molten material during falling to form semiconductor grains.
Dependencies are inferred from the claim text.