Scanning electron microscope
AssigneesHitachi High-Technologies Corporation, Hitachi Science Systems, Ltd.
InventorsYukari Dan, Ryuichiro Tamochi, Mitsugu Sato
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Abstract
A scanning electron microscope is provided which is capable of efficiently detecting ions, such as primary electron excitation ions, reflection electron excitation ions or secondary electron excitation ions caused by a bias electric field, thereby obtaining an absorption current. A scanning electron microscope irradiates an electron beam to a sample while keeping a sample chamber pressure at 1 Pa or higher, to detect generated ions and display a sample image. An ion detecting electrode is provided exclusively for detecting ions. The ion detecting electrode is arranged nearby a path for accelerating ions by a bias electrode.
Claims5
A scanning electron microscope for irradiating an electron beam to a sample while keeping a sample chamber pressure at 1 Pa or higher, to detect an generated ion and display a sample image, comprising:
- an ion detecting electrode exclusive for detecting the ion.
Dependencies are inferred from the claim text.