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US 2003/0079822 A1Published application
Direct bonding of articles containing silicon
AssigneeCorning Incorporated
InventorRobert Sabia
Life of this patent
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Abstract
Methods of bonding glass and silicon-containing articles are disclosed. Bonding is achieved without use of adhesives or high temperature fusion. A wide variety of glass and silicon-containing articles may be bonded by the methods of the invention.
Claims21
A method of bonding opposing surfaces of at least two silicon-containing articles:
- providing termination groups selected from the group consisting of ≡Si—OH, ≡Si—(OH)2, —Si—(OH)3, and —O—Si—(OH)3, and combinations thereof on the opposing surfaces and placing the opposing surfaces in contact.
A method of directly bonding two opposing silicon-containing surfaces, comprising:
- polishing the opposing surfaces;
- contacting the opposing surfaces with a detergent;
- contacting the opposing surfaces with an aqueous rinse solution;
- contacting the opposing surfaces with an acidic solution;
- contacting the opposing surfaces with a solution having a pH greater than 8;
- and
- placing the opposing surfaces in contact.
4 more elements
Dependencies are inferred from the claim text.