Flat-object holder and method of using the same

Abstract

Disclosed is a flat-object holder for holding a flat object-and-frame assembly, which has the flat object fixed to the frame with a protection tape. The flat-object holder comprises at least a flat object supporting area for fixedly holding the flat object via the protection tape by applying a suction force, and a frame fixing area for fastening the frame. The flat-object holder bearing the flat object-and-frame assembly can be fixedly held by a selected chuck table by applying a negative pressure to the flat object supporting area. The flat-object holder can transfer and put the flat object-and-frame assembly in a container. Thus, no matter how thin the flat object may be, it can be handled without the fear of breaking.

Dependencies are inferred from the claim text.