Transfer of optical element patterns on a same side of a substrate already having a feature thereon
AssigneeDigital Optics Corporation
InventorsThomas J. Suleski, Robert Russell Boye, William Delaney, Harris Miller, James Morris, Hongtao Han, Jay Mathews
Life of this patent
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Abstract
A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.
Claims35
An optical element comprising:
- a refractive optical element in a first surface of a substrate;
- a diffractive optical element in the first surface of the substrate, the diffractive optical element in a separate portion of the substrate than the refractive optical element, the refractive and the diffractive optical elements having been transferred into the first surface of the substrate.
A method of making an optical element on a first surface of a substrate already having features with a vertical dimension thereon, the method comprising:
- creating a pattern for the optical element on the first surface of the substrate, in a separate portion of the substrate from the features;
- providing a protective layer over the features;
- transferring the pattern into the substrate using an analog etch to form the optical element, the protective layer protecting the features during said transferring;
- and
- removing the protective layer.
A method of making different optical element in a first surface of a substrate, the method comprising:
- forming a first optical element on the first surface of the substrate;
- creating a pattern for a second optical element on the first surface of the substrate, in a separate portion of the substrate from the first optical element;
- providing a protective layer over the first optical element, said providing being separate from said creating;
- transferring the pattern into the substrate to form the second optical element, the protective layer protecting the first optical element during said transferring;
- and
- removing the protective layer.
Dependencies are inferred from the claim text.