Heating resistor film, recording head substrate, recording head, and recording apparatus
AssigneeCanon Kabushiki Kaisha
InventorsSeiichi Tamura, Genzo Momma, Yukihiro Hayakawa, Yoshinori Kawasaki
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Abstract
To provide a heating resistor film having a sufficiently high durability to repetitive pulse applications, a recording head substrate including the heating resistor film, a recording head, and a recording apparatus. A heating resistor film that generates heat energy using currents flowing from a wire in a heat acting portion of a recording head substrate, is made of amorphous tantalum silicon nitride having a sheet resistance of 200 Ω/□ to 400 Ω/□, and has a thickness of 30 nm to 80 nm.
Claims18
A heating resistor film, comprising a metal silicide nitride as a main component and having a sheet resistance of 200 Ω/□ to 400 Ω/□ and a thickness of 30 nm to 80 nm.
A recording head substrate with a layered structure, comprising a heating resistor film that generates heat energy used for recording an image on a recording material, has a sheet resistance of 200 Ω/□ to 400 Ω/□, and contains a metal silicide nitride as a main component,
- wherein the heating resistor film has a thickness of 30 nm to 80 nm.
A recording head for recording an image on a recording material, comprising a heat resistor film that contains a metal silicide nitride as a main component and has a sheet resistance of 200 Ω/□ to 400 Ω/□, the recording head using heat energy generated by the heat resister film for the recording, wherein the heating resistor film has a thickness of 30 nm to 80 nm.
A recording apparatus, comprising:
- means for conveying a recording material;
- and
- a recording head for recording an image on the recording material, including a heat resistor film that contains a metal silicide nitride as a main component and has a sheet resistance of 200 Ω/□ to 400 Ω/□, the recording head using heat energy generated by the heat resistor film for the recording, wherein the heating resistor film has a thickness of 30 nm to 80 nm.
Dependencies are inferred from the claim text.