Ceramic element, method for producing ceramic element, display device, relay device, and capacitor
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Toshikatsu Kashiwaya, Nobuo Takahashi
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AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Toshikatsu Kashiwaya, Nobuo Takahashi
Estimating the term…
A ceramic element including a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t≦2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p.
A display device comprising an optical waveguide plate for introducing light thereinto, and a driving unit provided opposingly to one plate surface of said optical waveguide plate and including a number of actuator elements arranged corresponding to a large number of picture elements, for displaying, on said optical waveguide plate, a picture image corresponding to an image signal by controlling leakage light at a predetermined portion of said optical waveguide plate by controlling displacement action of each of said actuator elements in a direction to make contact or separation with respect to said optical waveguide plate in accordance with an attribute of said image signal to be inputted, wherein said actuator element comprises:
Dependencies are inferred from the claim text.