Electrostatic actuator
AssigneeNEC Corporation
InventorKenichiro Suzuki
Life of this patent
Estimating the term…
Abstract
An electrostatic actuator has: an upper structure that is connected, via an arm, to a supporting base provided on a substrate and is supported in a space existing over the substrate; a lower structure that is provided in a substrate position in such a way as to oppose the upper structure; an inclination structure that is provided with respect to either one of the upper structure and the lower structure so as to make small the distance between the upper structure and the lower structure; and one or more electrodes that are provided with respect to the other structure in corresponding relationship to the inclination structure.
Claims7
An electrostatic actuator comprising:
- an upper structure that is connected, via an arm, to a supporting base provided on a substrate and is supported in a space existing over the substrate;
- a lower structure that is provided in a substrate position in such a way as to oppose the upper structure;
- an inclination structure that is provided with respect to either one of the upper structure and the lower structure so as to make small the distance between the upper structure and the lower structure;
- and
- one or more electrodes that are provided with respect to the other structure in corresponding relationship to the inclination structure;
- wherein
- by a voltage being applied between the electrode and a structure having the inclination structure, the upper structure is inclined toward the lower structure side.
Dependencies are inferred from the claim text.