Differential pumping seal apparatus
AssigneeEbara Corporation
InventorHiroyuki Shinozaki
Life of this patent
Estimating the term…
Abstract
A differential pumping seal apparatus includes a differential pumping seal for sealing a first space and a second space from each other in a non-contact manner, and a back up seal mechanism for sealing the first space and the second space from each other in a contact manner. The back up seal mechanism is operated to seal the first space and the second space from each other only when the differential pumping seal is stopped or while operation of said differential pumping seal is stopped.
Claims10
A differential pumping seal apparatus comprising:
- a differential pumping seal for sealing a first space and a second space from each other in a non-contact manner;
- and
- a back up seal mechanism for sealing said first space and said second space from each other in a contact manner;
- wherein said back up seal mechanism seals said first space and said second space from each other only when operation of said differential pumping seal is stopped or while operation of said differential pumping seal is stopped.
A differential pumping seal apparatus comprising:
- a partition wall for dividing a first space and a second space from each other;
- a movable body provided so as to pass through said partition wall;
- a differential pumping seal for sealing said first space and said second space from each other in a non-contact manner;
- and
- a back up seal mechanism for closing a gap between said partition wall and said movable body in a contact manner so as to seal said first space and said second space from each other;
- wherein said back up seal mechanism seals said first space and said second space from each other only when operation of said differential pumping seal is stopped or while operation of said differential pumping seal is stopped.
A differential pumping seal apparatus comprising:
- a first member for defining at least one of a first space and a second space whose atmospheres are different from each other;
- a second member movable relatively to said first member;
- a differential pumping seal for sealing a gap between said first space and said second space in a non-contact manner;
- and
- a seal element for separating said first space and said second space from each other in a contact manner only when said differential pumping seal does not function;
- wherein said seal element comprises a diaphragm seal member which is extensible and has an edge portion fixed to said first member, and said diaphragm seal member projects toward said second member by a fluid pressure so as to be brought into contact with said second member.
A differential pumping seal apparatus comprising:
- a first member for defining at least one of a first space and a second space whose atmospheres are different from each other;
- a second member movable relatively to said first member;
- a differential pumping seal for sealing a gap between said first space and said second space in a non-contact manner, said gap being formed only on one side of said second member, one of said first and second spaces being defined by said first member and said second member;
- a seal element for separating said first space and said second space from each other in a contact manner only when said differential pumping seal does not function, said seal element comprising a fixed seal member which is fixed to said first member and is capable of being brought into contact with said second member;
- and
- a push device for pushing said second member toward said first member to bring said second member into contact with said fixed seal member only when said differential pumping seal does not function.
Dependencies are inferred from the claim text.