Semiconductor device having line-and-space pattern group
AssigneeKabushiki Kaisha Toshiba
InventorOsamu Ikeda
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AssigneeKabushiki Kaisha Toshiba
InventorOsamu Ikeda
Estimating the term…
A first insulating film is formed on a semiconductor substrate. A first pattern group having a plurality of first conductors respectively having a first width and separated from each other by a first interval is formed on the first insulting film. A second conductor having a second width larger than the first width is formed separately from a first conductor of the plurality of first conductors at an end of the first pattern group by a first distance in parallel with the plurality of first conductors. A third conductor having a width equal to the second width is formed on the same side as the second conductor with respect to the first pattern group and separated from the first conductor by the first distance. A fourth conductor having a width equal to the second width is formed between the second and third conductors and separated from the first conductor by the first distance.
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.