Patterned structure reproduction using nonsticking mold
OwnerWu-Sheng Shih, James E. Lamb III +1inventors
InventorsWu-Sheng Shih, James E. Lamb III, Mark Daffron
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Abstract
Novel nonstick molds and methods of forming and using such molds are provided. The molds are formed of a nonstick material such as those selected from the group consisting of fluoropolymers, fluorinated siloxane polymers, silicones, and mixtures thereof. The nonstick mold is imprinted with a negative image of a master mold, where the master mold is designed to have a topography pattern corresponding to that desired on the surface of a microelectronic substrate. The nonstick mold is then used to transfer the pattern or image to a flowable film on the substrate surface. This film is subsequently cured or hardened, resulting in the desired pattern ready for further processing.
Claims41
A negative used in the fabrication of microelectronic devices which comprise a substrate and an impressible layer on the substrate, said negative having a pattern including a plurality of topography features, said negative comprising a unitary body formed of a nonstick material and including an impression surface, said body having sufficient rigidity to impress said pattern into the surface of said layer during said fabrication.
The combination of:
- a microelectronic substrate having an impressible surface;
- and
- a negative having an impression surface which comprises a pattern including a plurality of topography features, said negative comprising a unitary body formed of a nonstick material, said body having sufficient rigidity to impress said pattern into the surface of said substrate.
A method of transferring a pattern, said method comprising the steps of:
- providing a negative having an impression surface which comprises a pattern including a plurality of topography features, said negative comprising a unitary body formed of a nonstick material;
- and
- contacting said negative with a microelectronic substrate having an impressible surface under conditions to impress said pattern into the surface of said impressible surface.
A method of forming a nonstick mold for use in the fabrication of microelectronic devices, said method comprising the steps of:
- providing a master mold having a patterned surface including a plurality of topography features;
- pressing a nonstick material against said patterned surface under conditions for forming a negative of said patterned surface in said material;
- and
- separating said nonstick material from said surface to yield the nonstick mold.
Dependencies are inferred from the claim text.