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AssigneeCanon Kabushiki Kaisha
InventorsTetsuro Saito, Katsumi Nakagawa, Tatsumi Shoji, Takehito Yoshino, Shoji Nishida, Masaki Mizutani
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A liquid phase growth method is provided which comprises dipping a seed substrate in a solution in a vessel having a crystal raw material melted therein and growing a crystal on the substrate, wherein a fin is provided on a bottom of the vessel, for regulating a flow of the solution from a central portion outside in a radial direction in the vessel; a flow-regulating plate is provided in the vicinity of an inner sidewall of the vessel, for regulating a flow of the solution from the bottom upwardly; and the vessel is rotated while regulating a flow of the solution by an action of the fin and the flow-regulating plate to bring the solution into contact with the seed substrate. Thus, there is provided a liquid phase growth method and apparatus capable of providing a high growth rate and showing little difference in the growth rate among the substrates or within the same substrate even when a number of substrates are charged in one batch.
A liquid phase growth method comprising dipping a seed substrate in a solution in a vessel having a crystal raw material melted therein and growing a crystal on the substrate, wherein a fin is provided on a bottom of the vessel, for regulating a flow of the solution from a central portion outside in a radial direction in the vessel;
A liquid phase growth apparatus comprising a vessel for housing a solution having a crystal raw material melted therein and substrate support means for supporting and dipping a seed substrate in the solution, wherein a fin is provided on a bottom of the vessel radially in a radial direction thereof;
A liquid phase growth method comprising dipping a substrate in a solution housed in a vessel and containing a crystal raw material, and liquid-phase growing the material on the substrate while moving the substrate in a plane direction thereof in the dipped state to agitate the solution.
A liquid phase growth apparatus comprising a vessel housing a solution containing a crystal raw material, dipping means for dipping a substrate in the solution, and moving means for moving the substrate in a plane direction thereof in a state in which the substrate is dipped in the solution by the dipping means.
A liquid phase growth method comprising dipping a seed substrate in a solution in a vessel having a crystal raw material melted therein and growing a crystal on the substrate, wherein a first fin is provided on a bottom of the vessel, for regulating a flow of the solution from a central portion outside in a radial direction in the vessel;
A liquid phase growth apparatus comprising a vessel for housing a solution having a crystal raw material melted therein and substrate support means for supporting and dipping a seed substrate in the solution, wherein a first fin is provided on a bottom of the vessel radially in a radial direction thereof and a second fin is provided on an inner sidewall of the vessel.
A liquid phase growth apparatus comprising a vessel for housing a solution having a crystal raw material melted therein and substrate support means for supporting and dipping a seed substrate in the solution, wherein a flow-regulating plate is provided in the vicinity of an inner sidewall of the vessel perpendicularly to a surface of the solution.
Dependencies are inferred from the claim text.