System and method for controlling priority of lots employed in MES
OwnerWonin Baek, Heungchul Park +3inventors
InventorsWonin Baek, Heungchul Park, Joodeok Yun, Jonghyun Baek, Joosuck Jung
Life of this patent
Estimating the term…
Abstract
The present invention relates to a method for controlling priority of lots employed in a MES, and more particularly, to a method for controlling priority of lots employed in a MES, wherein the priority of the lots provided by the MES can be automatically set up depending on a processing cycle time.
Claims9
A method for controlling priorities of lots employed in a MES (Manufacturing Execution System) for use in semiconductor manufacturing processes, the MES including an equipment computer for managing the semiconductor manufacturing processes, a management computer for administratively managing the semiconductor manufacturing processes, and a server system for automatically setting up the priorities of the lots by using data on processing cycle time received from the equipment computer and the management computer, comprising the steps of:
- (a) setting up estimated time of the processing cycle time by inputting queue time and process time for each process in the semiconductor manufacturing processes by using the management computer;
- (b) measuring the measured time of the processing cycle time by using start time and finish time of said each process by using the equipment computer;
- (c) setting up a setup ratio of a reflected measured time to be reflected in said each process to the estimated time in order to obtain the processing cycle time to be actually used;
- (d) calculating the processing cycle time to be actually used on the basis of the reflected measured time;
- (e) creating a list containing the priorities of the lots based on the processing cycle time calculated at step (d);
- and
- (f) displaying the list created at step (e) containing the priority of the lots.
A system for controlling priority of lots employed in a MES (Manufacturing Execution System) for use in processes employed in a semiconductor manufacturing, comprising:
- a LAN (Local Area Network) for connecting various equipment for network communication;
- an equipment computer for managing the semiconductor manufacturing processes;
- a management computer for administratively managing the product manufacturing process;
- and
- a MES (Manufacturing Execution System) including a network interface card for physically connecting with the LAN for data transfer, a key input unit for inputting data, a data memory for storing data inputted from the key input unit or received via the network interface card, a program memory for storing a program for a method for controlling the priority of lots, a control unit for supervising and controlling operations in the whole system, a monitor for displaying data processing and progress status in the system on a screen thereof, and a database for storing data inputted from the equipment computer and the management computer,
- wherein the equipment computer, the management computer and the MES are connected through the LAN, and
- wherein the MES calculates the priority of the lots on the basis of measured time of processing cycle time received from the equipment computer and estimated time of the processing cycle time received from the managing computer, thereby creating a list containing the priority of the lots and controlling output of the list.
Dependencies are inferred from the claim text.