Method of planarizing substrate, magnetic head and manufacturing method of the same
AssigneeSony Corporation
InventorsYoshihiko Inoue, Seiichi Ogata
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Abstract
In order to have a remarkably planarized substrate easily, a glass thin film is predeposited on a surface of a non-magnetic substrate. The non-magnetic substrate is subjected to heat treatment until the glass thin film is softened to a predetermined viscosity, and then the non-magnetic substrate is cured until the glass thin film is hardened.
Claims19
A method of planarizing a substrate, comprising the steps of:
- predepositing a glass thin film on a surface of a substrate;
- performing heat treatment on said substrate until said glass thin film is softened to a predetermined viscosity;
- and
- curing said substrate after the heat treatment until said glass thin film is hardened.
A magnetic head comprising a pair of magnetic core halves, each of said halves including a non-magnetic substrate and a metal magnetic thin film deposited over a surface of said non-magnetic substrate, said pair of halves being bonded integrally to each other with the one metal magnetic thin film abutting on the other and with a magnetic gap formed between the abutting surfaces, the respective surfaces of said non-magnetic substrates over which said metal magnetic thin films are deposited being in nonparallel with said magnetic gap,
- wherein said non-magnetic substrate has a glass thin film deposited on the surface thereof over which said metal magnetic film is deposited.
A method of manufacturing a magnetic head, comprising the steps of:
- predepositing a glass thin film on a surface of a non-magnetic substrate having a plurality of grooves formed thereon at a predetermined interval, performing heat treatment on said non-magnetic substrate until said glass thin film is softened to a predetermined viscosity, and curing said non-magnetic substrate after the heat treatment until said glass thin film is hardened so as to planarize the surface of said non-magnetic substrate;
- depositing a metal magnetic thin film on said non-magnetic substrate;
- forming a glass layer to cover said non-magnetic substrate on which said metal magnetic thin film is deposited, and depositing a thin film coil in a recess formed in a surface of said glass layer subjected to planarizing to produce a pair of magnetic core half blocks;
- placing face-to-face and bonding said pair of magnetic core half blocks such that end faces of said respective metal magnetic thin films confront each other through a non-magnetic thin film to produce a magnetic core block;
- and
- cutting said magnetic core block into individual magnetic heads.
Dependencies are inferred from the claim text.