Fluoro-containing photosensitive polymer and photoresist composition containing the same

A photosensitive polymer comprising:

• (a) perfluoro-2,2-dimethy-1,3-dioxol derivative having the following repeating unit:
• 51
• and (b) norbornen derivative having the following repeating unit:
• 52
• wherein R9 is H, F, CF3, OCF3, OCF2CF3, OCF2CF2CF3, CH2C(CF3)2OH, fluorinated alkyloxy group having an acid-labile group, n-perfluoroalkyl group having I to 8 carbon atoms, ORF, wherein RF is n-perfluoroalkyl group having 1 to 3 carbon atoms, or OQZ, wherein Q is perfluorinated alkylene group having 0 to 5 oxygen atoms, the sum of carbon atom and oxygen atom in the Q is 2 to 10, and Z is COOR, SO2F, CN, COF, or OCH3, wherein R is alkyl group having 1 to 4 carbon.

A photosensitive polymer comprising:

• (a) perfluoro-2,2-dimethy-1,3-dioxol derivative having the following repeating unit:
• 55
• (b) vinyl derivative having the following repeating unit:
• 56
• and (c) norbornen derivative having the following repeating unit:
• 57
• wherein R1 is H, Cl, or F;
• each of R2 and R3 is H or F;
• each of R4 and R9 is H, F, OF3, OCF3, OCF2CF3, OCF2CF2CF3, CH2C(CF3)2OH, fluorinated alkyloxy group having an acid-labile group, n-perfluoroalkyl group having 1 to 8 carbon atoms, ORF, wherein RF is n-perfluoroalkyl group having 1 to 3 carbon atoms, or OQZ, wherein Q is perfluorinated alkylene group having 0 to 5 oxygen atoms, the sum of carbon atom and oxygen atom in the Q is 2 to 10, and Z is COOR, SO2F, CN, COF, or OCH3, wherein R is alkyl group having 1 to 4 carbon.

A photoresist composition comprising:

• (a) a photosensitive polymer comprsing:
• (a-1) perfluoro-2,2-dimethy-1,3-dioxol derivatives having the following repeating unit:
• 59
• and (a-2) at least one comonomer of a vinyl derivative having the following repeating unit:
• 60
• and a norbornen derivative having the following repeating unit:
• 61
• ;
• and (b) a photoacid generator (PAG),
• wherein R1 is H, Cl, or F;
• each of R2 and R3 is H or F;
• each of R4 and R9 is H, F, CF3, OCF3, OCF2CF3, OCF2CF2CF3, CH2C(CF3)2OH, fluorinated alkyloxy group having an acid-labile group, n-perfluoroalkyl group having 1 to 8 carbon atoms, ORF, wherein RF is n-perfluoroalkyl group having 1 to 3 carbon atoms, or OQZ, wherein Q is perfluorinated alkylene group having 0 to 5 oxygen atoms, the sum of carbon atom and oxygen atom in the Q is 2 to 10, and Z is COOR, SO2F, CN, COF, or OCH3, wherein R is alkyl group having 1 to 4 carbon.