Substrate coating unit and substrate coating method

A method for coating a substrate with a coating solution,

• wherein a coating solution discharge member which has a shape with a longer length at least than a radius of the substrate and which includes a coating solution discharge port for discharging the coating solution onto a center of the substrate and a solvent mist discharge port for discharging a solvent mist of the coating solution onto a peripheral portion including an outer edge portion of the substrate is used,
• the coating method comprising the steps of:
• discharging only the coating solution to the substrate from the coating solution discharge port;
• subsequently discharging the solvent mist onto the peripheral portion of the substrate from the solvent mist discharge port in a mid-course of diffusing the coating solution on the substrate by rotating the substrate;
• and
• thereafter, continuously discharging the solvent mist with a discharge amount of the solvent mist being reduced.