Surface emission laser and manufacturing method for surface emission laser, light reception element and manufacturing method for light reception element, and optical transceiver module

A manufacturing method for a surface emission laser, comprising:

• the step of forming a convex light emission portion for emitting laser light by etching a semiconductor laminate, which is laminated on one surface of a semiconductor substrate, in a vertical direction;
• the step of forming an opening portion from the other surface of the semiconductor substrate to the end portion on the semiconductor substrate side of the light emission portion in order to become narrow from the other surface of the semiconductor substrate toward the end portion on the semiconductor substrate side of the light emission portion;
• the step of injecting a transparent resin into the opening portion;
• and
• the step of forming a lens by curing the resin.

A manufacturing method for a light reception element, comprising:

• the step of forming a convex light reception portion, into which laser light enters, by etching a semiconductor layer, which is formed on one surface of a semiconductor substrate, in a vertical direction;
• the step of forming an opening portion from the other surface of the semiconductor substrate to the end portion on the semiconductor substrate side of the light reception portion in order to become narrow from the other surface of the semiconductor substrate toward the end portion on the semiconductor substrate side of the light reception portion;
• the step of injecting a transparent resin into the opening portion;
• and
• the step of forming a lens by curing the resin.