Thin film magnetic head and method of manufacturing thin film magnetic head
AssigneeSAE Magnetics (H.K.) Ltd.
InventorNaoto Matono
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AssigneeSAE Magnetics (H.K.) Ltd.
InventorNaoto Matono
Estimating the term…
A thin film magnetic head capable of improving a high frequency response characteristic and the efficiency of the head, and reducing the manufacturing time, and a method of manufacturing the thin film magnetic head. After laminating a precursory layer for forming a coil pattern, a precursory layer for forming a separate layer, and a precursory layer for forming a coil pattern, these layers are continuously patterned with the use of a mask by etching to selectively form the coil pattern, the separate layer and the coil pattern in a batch process. The number of the manufacturing steps (the number of photolithography processes) is reduced compared with the case where the coil pattern, the separate layer, and the coil pattern are formed by plating in separate processes, so that a thin film coil comprising the coil patterns can be formed in a shorter time.
A method of manufacturing a thin film magnetic head including two magnetic layers magnetically coupled to each other, and having two magnetic poles which face each other with a gap layer in between, and face a recording medium, a thin film coil including a first hierarchical pattern and a second hierarchical pattern, and an insulating layer for insulating the thin film coil from the two magnetic layers, the method comprising:
A thin film magnetic head comprising:
A thin film magnetic head comprising:
Dependencies are inferred from the claim text.