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US 2002/0176095 A1Published application
Imaging system and method for positioning a measuring tip onto a contact region of a microchip
AssigneeInfineon Technologies AG
InventorsStefan Dietrich, Manfred Dobler, Thilo Marx, Peter Mayer
Life of this patent
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Abstract
The imaging system provides assistance during the positioning of a measuring tip as it is placed onto a contact region of a microchip, in order to measure an on-chip signal. The contact region is imaged in a magnified fashion. An insertion device is provided that is suitable for providing a display of the on-chip signal in the imaging plane.
Claims11
In a system for positioning a measuring tip onto a contact region and for measuring a signal at the contact region with a measuring unit, an imaging system, comprising:
- a display device having an imaging plane and a device for imaging the contact region onto said imaging plane in a magnified fashion;
- an insertion device connected to the measuring unit for displaying the signal measured with the measuring tip in said imaging plane.
A display method, which comprises:
- placing a measuring tip on a contact region;
- measuring the contact region with the measuring tip and generating a measurement signal;
- and
- displaying the measurement signal and the contact region in an imaging plane.
1 more element
Dependencies are inferred from the claim text.