Apparatus for mounting an optical element in an optical system
AssigneeCarl Zeiss SMT GmbH
InventorsThomas Petasch, Hartmut Muenker, Klaus-Dieter Klein
Life of this patent
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Abstract
An apparatus or mounting an optical element in an optical system, in particular a mirror or a lens, in a projection exposure machine, in particular a projection lens in semiconductor lithography, is connected to an external base structure with the aid of at least three articulation sites that are arranged on the circumference of the optical element and at which a bearing device acts in each case, wherein the bearing device has at least one bending element, resembling a leaf spring, arranged tangentially to the optical element, and at least one bending element, resembling a leaf spring, arranged in the radial direction relative to the optical element.
Claims24
An apparatus for mounting an optical element in an optical system, having at least three articulation sites arranged on a circumference of the optical element and at which there acts in each case one bearing device which is connected to an external base structure on the side averted from the articulation site, wherein the bearing device has at least one bending element, resembling a leaf spring, arranged tangentially to the optical element, and at least one bending element, resembling a leaf spring, arranged in the radial direction relative to the optical element.
The apparatus as claimed in c aim 20, wherein said sensors are designed as contactless distance measuring sensors arranged distributed over the circumference of the housing structure.
Dependencies are inferred from the claim text.