Feedback position control system and method for an interferometer
OwnerGregory S. Hillinventor
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OwnerGregory S. Hillinventor
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A feedback position control system and method enable an optical element in a variable arm of an interferometer to be varied according to a predesignated motion profile. The system and method detect a reference optical signal that varies in intensity according to a position of the optical element in the variable arm. The system and method receive the detected reference optical signal, derive a motion profile from the detected reference optical signal and compare the derived motion profile to the predesignated motion profile to generate a control signal based on a deviation between the derived motion profile and the predesignated motion profile. The control signal is used to adjust the position of the optical element in the variable arm of the interferometer to minimize the deviation between the derived motion profile and the predesignated motion profile.
A position control system for an interferometer, comprising:
A position control method for an interferometer, comprising:
The position control method of claim 11 wherein the predesignated motion profile is one of a predesignated velocity profile, a predesignated acceleration profile, and a predesignated jerk profile, the derived motion profile being a derived velocity profile when the predesignated motion profile is a predesignated velocity profile, the derived motion profile being a derived acceleration profile when the predesignated motion profile is a predesignated acceleration profile, and the derived motion profile being a derived jerk profile when the predesignated motion profile is a predesignated jerk profile.
Dependencies are inferred from the claim text.