Device and method for controlling the quality of microdroplets deposited on a substrate
OwnerStefan Beseki, Holger Gruhler +1inventors
InventorsStefan Beseki, Holger Gruhler, Roland Zengerle
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Abstract
A device for controlling the quality of microdroplets deposited on a substrate comprises a light source for illuminating the substrate which has the microdroplets deposited thereon. An image generator is provided for receiving the light which has been produced by the light source, fallen through the substrate or reflected by the substrate, so as to generate an image. Furthermore, an identifier and an analyzer are provided for analyzing the generated image with respect to patterns created in said image as a result of a refractive effect produced by microdroplets deposited on the substrate.
Claims11
A device for controlling the quality of microdroplets deposited on a substrate, comprising:
- a light source for illuminating the substrate on which the microdroplets are deposited;
- an image generator for receiving the light which has been produced by the light source and which has fallen through the substrate or reflected by the substrate so as to generate an image;
- an identifier for identifying in said image patterns which are created by a refractive effect produced by the convex surface of transparent microdroplets deposited on the substrate;
- and
- an analyser for analyzing the generated image based on the identified patterns with respect to at least the presence, the position or the size of microdroplets deposited on the substrate, microdroplets being discriminated from solid particles by said pattern.
A method for controlling the quality of microdroplets deposited on a substrate, comprising the steps of:
- a) illuminating, by means of a light source, the substrate having the microdroplets deposited thereon;
- b) receiving the light which has been produced by the light source and fallen through the substrate, or reflected by the substrate, so as to generate an image;
- c) identifying in said image patterns which are created by a refractive effect produced by the convex surface of transparent microdroplets deposited on the substrate;
- and
- d) analyzing the image based on the identified patterns with respect to at least the presence, the position or the size of microdroplets deposited on the substrate (2;
- 2′), microdroplets being discriminated from solid particles by said pattern.
Dependencies are inferred from the claim text.