Apparatus and method for planarizing a workpiece and a workpiece handling wand for use in the method

Apparatus for planarizing a surface of a work piece comprising:

• a work piece carrier housing;
• a flexible diaphragm coupled to the work piece carrier housing, the flexible diaphragm comprising a horizontal portion against which a work piece can be positioned for planarization and a vertical portion having a substantially cylindrical shape extending upwardly from the horizontal portion;
• and
• a wear ring having a lower surface, a substantially cylindrical inner surface, and a substantially cylindrical outer surface, the wear ring flexibly mounted to the work piece carrier housing and surrounding the flexible diaphragm, the wear ring configured to be moveable between a lowered position in which the lower surface is substantially coplanar with the surface of the work piece and a raised position in which at least a portion of the vertical portion is exposed.

A work piece handling wand for moving a substantially circular work piece to and in alignment with a planarizing apparatus, the work piece handling wand comprising:

• a cradle portion;
• a movable finger portion spaced apart from the cradle portion at the distal end of a longitudinal axis extending from the cradle portion to the movable finger portion, the cradle portion and the finger portion configured to confine a work piece therebetween;
• and
• a reference surface configured to register with a reference surface on the planarizing apparatus to position the work piece in alignment with the planarizing apparatus.

A method for planarizing a work piece utilizing a work piece planarizing apparatus comprising a work piece carrier head, a wear ring, and a work piece carrier plate mounted therewith, the work piece carrier plate movable in a vertical direction from a retracted position to an extended position, the work piece carrier plate having a substantially planar surface with a plurality of apertures therethrough and a lateral edge, the lateral edge exposed when the work piece carrier plate is positioned in the extended position, and the wear ring positioned to surround the work piece carrier plate when the work piece carrier plate is positioned in the retracted position, the method comprising the steps of:

• positioning the work piece carrier plate in the extended position;
• transporting a work piece to a position proximate the substantially planar surface;
• drawing fluid through the plurality of apertures;
• and
• positioning the work piece in contact with the substantially planar surface so the fluid drawn through the plurality of apertures attracts and holds the work piece to the substantially planar surface.

A method for planarizing a work piece utilizing a work piece planarizing apparatus comprising a work piece carrier head, a flexible work piece support diaphragm coupled to the work piece carrier head, and a wear ring flexibly mounted to the work piece carrier head and surrounding the flexible work piece diaphragm, the method comprising the steps of:

• retracting the wear ring to expose a lateral edge of the flexible work piece diaphragm;
• centering a work piece to be polished in alignment with the flexible work piece diaphragm;
• lowering the wear ring to position a lower surface thereof substantially coplanar with the work piece;
• and
• lowering the work piece carrier head to place the work piece in contact with a polishing pad.

A method for planarizing a work piece utilizing a work piece handling wand and a work piece planarizing apparatus comprising a work piece carrier head, a work piece support surface coupled to the work piece carrier head, and a wear ring coupled to the work piece carrier head and surrounding the work piece support surface, the method comprising the steps of:

• gripping a work piece with the work piece handling wand;
• aligning the work piece handling wand and the work piece to the work piece support surface;
• transferring the work piece from the work piece handling wand to the work piece support surface;
• and
• lowering the work piece carrier head to press the work piece into contact with a polishing surface.

A work piece handling wand for picking and placing a work piece having a thin, substantially circular disk shape, the wand comprising:

• an elongate frame having a proximal end and a distal end;
• a cradle portion coupled to the proximal end, the cradle portion comprising a first floor portion and a first raised wall portion, the first raised wall portion having a concave surface opening in the distal direction, the concave surface having a radius of curvature sized to substantially match the radius of curvature of the work piece;
• a gripping finger slidably coupled to the distal end and moveable toward and away from the proximal end, the gripping finger comprising a first base portion and a second raised wall portion, the second raised wall portion having a surface facing toward the cradle portion;
• and
• an actuator mounted to the frame and attached to the gripping finger for moving the gripping finger toward and away from the proximal end.

A method for planarizing a work piece by a process of chemical mechanical planarization comprising the steps of:

• moving a work piece handling wand comprising a cradle having a raised concave wall portion with a radius of curvature substantially the same as the radius of curvature of the work piece and a moveable gripping finger having a raised wall portion and adapted for movement toward and away from the cradle to a position proximate the work piece;
• moving the raised wall portion of the moveable gripping finger away from the raised concave wall portion of the cradle a distance greater than the diameter of the work piece;
• positioning the work piece handling wand such that the work piece is between the raised wall portion of the moveable gripping finger and the concave wall portion of the cradle;
• and
• moving the moveable gripping finger toward the cradle until the work piece is gripped between the raised wall portion of the moveable gripping finger and the concave wall portion of the cradle.