Measuring method, inspection method, inspection device, semiconductor device, method of manufacturing a semiconductor device, and method of manufacturing an element substrate

A measuring method of a circuit or a circuit element, comprising:

• operating the circuit or the circuit element by applying a voltage to the circuit or the circuit element in a non-contact manner;
• forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element;
• and
• reading a voltage of the modulated signal in a non-contact manner.

An inspecting method of a circuit or a circuit element, comprising:

• applying a first ac voltage between a pair of terminals of a first coil;
• overlapping the first coil and a second coil with a certain spacing set therebetween;
• forming a signal for operating the circuit or the circuit element from a second ac voltage generated between a pair of terminals of the second coil;
• operating the circuit or the circuit element by inputting the signal to the circuit or the circuit element;
• forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element;
• applying the modulated signal between a pair of terminals of a third coil;
• overlapping the third coil and a fourth coil with a certain spacing set therebetween;
• and
• inspecting the operating condition of the circuit or the circuit element through a fourth voltage generated between a pair of terminals of the fourth coil.

An inspecting method of inspecting a circuit or a circuit element, comprising:

• applying a first ac voltage between a pair of terminals of a first coil;
• overlapping the first coil and a second coil with a certain spacing set therebetween;
• operating the circuit or the circuit element by rectifying a second ac voltage generated between a pair of terminals of the second coil or shaping a waveform of the second ac voltage and by applying the rectified or waveform-shaped voltage to the circuit or the circuit element;
• forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element;
• applying the modulated signal between a pair of terminals of a third coil;
• overlapping the third coil and a fourth coil with a certain spacing set therebetween;
• and
• inspecting the operating condition of the circuit or the circuit element through a fourth voltage generated between a pair of terminals of the fourth coil.

An inspecting method of a circuit or a circuit element, comprising:

• applying first ac voltages differing in phase between pairs of terminals of a plurality of first coils;
• overlapping the plurality of first coils and a plurality of second coils with a certain spacing set therebetween;
• generating ac voltages differing in phase between pairs of terminals of the plurality of second coils;
• generating dc voltages by rectifying the ac voltages generated between the pairs of terminals of the plurality of second coils and differing in phase and by adding together the rectified ac voltages;
• applying a second ac voltage between a pair of terminals of a third coil;
• overlapping the third coil and a fourth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the fourth coil;
• modulating the ac voltage generated between the pair of terminals of the fourth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the dc voltage to the circuit or the circuit element;
• applying the modulated ac voltage between a pair of terminals of a fifth coil;
• overlapping the fifth coil and a sixth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the sixth coil;
• and
• inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the sixth coil.

An inspecting method of a circuit or a circuit element, comprising:

• applying first ac voltages differing in phase between pairs of terminals of a plurality of first coils;
• overlapping the plurality of first coils and a plurality of second coils with a certain spacing set therebetween;
• generating ac voltages differing in phase between pairs of terminals of the plurality of second coils;
• generating a dc voltage by rectifying the ac voltages generated between the pairs of terminals of the plurality of second coils and differing in phase and by adding together the rectified ac voltages;
• applying a second ac voltage between a pair of terminals of a third coil;
• overlapping the third coil and a fourth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the fourth coil;
• generating a voltage for driving the circuit or the circuit element by shaping the waveform of the ac voltage generated between the pair of terminals of the fourth coil;
• applying a third ac voltage between a pair of terminals of a fifth coil;
• overlapping the fifth coil and a sixth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the sixth coil;
• modulating the ac voltage generated between the pair of terminals of the sixth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the dc voltage and the voltage for driving the circuit and the circuit element to the circuit or the circuit element;
• applying the modulated ac voltage between a pair of terminals of a seventh coil;
• overlapping the seventh coil and a eighth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of the eighth coil;
• and
• inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the eighth coil.

An inspecting method of a circuit or a circuit element, comprising:

• applying a first ac voltage between a pair of terminals of a first coil;
• overlapping the first coil and a second coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the second coil;
• generating a voltage for driving the circuit or the circuit element by shaping the waveform of the ac voltage generated between the pair of terminals of the second coil;
• applying a second ac voltage between a pair of terminals of a third coil;
• overlapping the third coil and a fourth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the fourth coil;
• modulating the ac voltage generated between the pair of terminals of the fourth coil with a voltage output from the circuit or the circuit element, which output is obtained by applying the voltage for driving the circuit and the circuit element to the circuit or the circuit element;
• applying the modulated ac voltage between a pair of terminals of a fifth coil;
• overlapping the fifth coil and a sixth coil with a certain spacing set therebetween;
• generating an ac voltage between a pair of terminals of the sixth coil;
• and
• inspecting the operating condition of the circuit or the circuit element through the ac voltage generated across the sixth coil.

A device for inspecting a circuit or a circuit element provided on an element substrate, the device comprising:

• a first primary coil;
• a second secondary coil;
• means for overlapping the first primary coil and a first secondary coil provided on an element substrate with a certain spacing set between the first primary coil and the first secondary coil;
• means for overlapping the second secondary coil and a second primary coil provided on the element substrate with a certain spacing set between the second secondary coil and the second primary coil;
• means for applying an ac voltage between a pair of terminals of the first primary coil;
• and
• means for inspecting an operating condition of the circuit or the circuit element through an ac voltage generated between a pair of terminals of the second secondary coil.

A device for inspecting a circuit or a circuit element provided on an element substrate, the device comprising:

• a first primary coil;
• a second secondary coil;
• means for overlapping the first primary coil and a first secondary coil provided on the element substrate with a certain spacing set between the first primary coil and the first secondary coil;
• means for overlapping the second secondary coil and a second primary coil provided on the element substrate with a certain spacing set between the second secondary coil and the second primary coil;
• means for applying an ac voltage between a pair of terminals of the first primary coil;
• means for amplifying or buffer-amplifying an ac voltage generated between a pair of terminals of the second secondary coil;
• and
• means for inspecting the operating condition of the circuit or the circuit element through the ac voltage amplified or buffer-amplified.

A method of manufacturing an article, comprising:

• manufacturing a circuit or a circuit element;
• operating the circuit or the circuit element by applying a voltage to the circuit or the circuit element in a non-contact manner;
• reading a voltage output from the circuit or the circuit element in a non-contact manner;
• and
• inspecting an operating condition of the circuit or the circuit element.

A method of manufacturing an article, comprising:

• manufacturing a circuit or a circuit element;
• operating the circuit or the circuit element by applying a voltage to the circuit or the circuit element in a non-contact manner;
• forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element;
• reading a voltage of the modulated signal in a non-contact manner;
• and
• inspecting the operating condition of the circuit or the circuit element.

A method of manufacturing an article, comprising:

• manufacturing a circuit or a circuit element, a first coil, a second coil, a third coil, and a fourth coil;
• applying a first ac voltage between a pair of terminals of the first coil;
• overlapping the first coil and the second coil with a certain spacing set therebetween;
• forming a signal for operating the circuit or the circuit element from a second ac voltage generated between a pair of terminals of the second coil;
• operating the circuit or the circuit element by inputting the signal to the circuit or the circuit element;
• forming a modulated signal by modulating a third ac voltage with a voltage output from the circuit or the circuit element;
• applying a voltage the modulated signal between a pair of terminals of the third coil;
• overlapping the third coil and the fourth coil with a certain spacing set therebetween;
• and
• inspecting an operating condition of the circuit or the circuit element through a fourth ac voltage generated between a pair of terminals of the fourth coil.

An article comprising:

• a circuit or a circuit element;
• means for applying a voltage to the circuit or the circuit element in a non-contact manner;
• means for forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element;
• means for outputting a voltage of the modulated signal in a non-contact manner.

An article comprising:

• a circuit or a circuit element;
• means for applying a voltage to the circuit or the circuit element in a non-contact manner by using a first coil;
• means for forming a modulated signal by modulating an ac voltage with a voltage output from the circuit or the circuit element;
• and
• means for outputting a voltage of the modulated signal in a non-contact manner by using a second coil.

An article comprising:

• a circuit or a circuit element;
• a first coil;
• a second coil;
• a third coil;
• means for rectifying a first ac voltage generated between a pair of terminals of the first coil or shaping a waveform of the first ac voltage and for applying the rectified or waveform-shaped voltage to the circuit or the circuit element;
• and
• means for forming a modulated signal by modulating a second ac voltage generated between a pair of terminals of the second coil with a voltage output from the circuit or the circuit element and for applying the modulated signal between a pair of terminals of the third coil.

An article comprising:

• a circuit or a circuit element;
• a plurality of first coils;
• a second coil;
• a third coil;
• means for generating a dc voltage by rectifying first ac voltages generated between pairs of terminals of the plurality of first coils and by adding together the rectified voltages, and for applying the generated dc voltage to the circuit or the circuit element;
• and
• means for forming a modulated signal by modulating a second ac voltage generated between a pair of terminals of the second coil with a voltage output from the circuit or the circuit element, and for applying the modulated signal between a pair of terminals of the third coil.

An article comprising:

• a circuit or a circuit element;
• a first coil;
• a plurality of second coils;
• a third coil;
• a fourth coil;
• means for rectifying a first ac voltage generated between a pair of terminals of the first coil or shaping a waveform of the voltage, and for applying the rectified or waveform-shaped voltage to the circuit or the circuit element;
• means for generating a dc voltage by rectifying second ac voltages generated between pairs of terminals of the plurality of second coils and by adding together the rectified voltages, and for applying the generated dc voltage to the circuit or the circuit element;
• and
• means for forming a modulated signal by modulating a third ac voltage generated between a pair of terminals of the third coil with a voltage output from the circuit or the circuit element, and for applying the modulated signal between a pair of terminals of the fourth coil.