Method for fabrication of a molecular filter and apparatus formed by the same
AssigneeCalifornia Institute of Technology
InventorAxel Scherer
Life of this patent
Estimating the term…
Loading patent…
AssigneeCalifornia Institute of Technology
InventorAxel Scherer
Estimating the term…
The invention is a method for fabricating molecular filters which can separate objects approximately 1-5 nm in range, where the filtration size is controlled by using thin films of materials and technologies to form a filtration channel or pore in a middle thin film layer in a multilayered structure. Lithography is used to define two offset arrays of blind holes into the opposing sides of a multi-layer membrane. The blind holes extend across a thin central filtration layer. A selective etch is used to attack the filtration layer to form a communicating channel between the two holes. The only connection between one side of the filter and the other is through the channel in the filter layer, whose thickness, d, determines the largest size object which can traverse the filter.
A method comprising the steps of:
An apparatus comprising:
A nano-scale filter comprising:
Dependencies are inferred from the claim text.