Non-mechanical fabrication of carbon-containing work pieces
AssigneeHoneywell International Inc.
InventorIlan Golecki
Life of this patent
Estimating the term…
Abstract
Complex features and fine details are created in a carbon containing work piece by photolithography. A mask layer is deposited by evaporation onto the work piece. A desired pattern is created on the mask layer. The pattern is etched into the work piece and the remaining portion of the mask layer is dissolved.
Claims20
A method of forming features in a carbon-based work piece, the method comprising:
- depositing a mask layer on the work piece;
- creating a pattern in the mask layer;
- and
- etching the pattern into the work piece to a predetermined depth.
6 The method of claim 1, wherein the etching step comprises reactive ion etching the desired pattern into the work piece to a predetermined depth.
9 The method of claim 1, wherein that portion of the mask layer remaining after the etching step is dissolved by melting.
10 A method of forming details in a Carbon-Carbon work piece, the method comprising:
- depositing a mask layer on at least a portion of the work piece;
- creating the desired pattern in the mask layer;
- removing that portion of the mask layer forming the desired pattern;
- and
- etching the desired pattern to form the complex shape in the work piece.
The method of claim 10, wherein the mask layer is formed of aluminum.
The method of claim 10, wherein the mask layer is formed of silicon.
The method of claim 10, wherein the mask layer is deposited on the work piece by physical evaporation.
The method of claim 10, wherein the mask layer is deposited onto the work piece by sputtering.
The method of claim 10, wherein the mask layer is deposited onto the work piece by chemical vapor deposition.
The method of claim 10, wherein the mask layer is deposited onto the work piece by electroplating.
The method of claim 10, wherein the mask layer is deposited onto the work piece by electroless plating.
An article comprising:
- a carbon-containing work piece;
- and
- a mask layer on the work piece;
- the mask layer having an etched pattern extending through to the carbon-containing work piece.
Dependencies are inferred from the claim text.