US 2002/0172589 A1Published application

Vacuum pump

AssigneeBOC Edwards Techonlogies Limited

InventorsYoshihiro Yamashita, Yoshiyuki Sakaguchi, Yasushi Maejima

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Abstract

The present invention provides a vacuum pump capable of preventing dropping of a pump at the time of occurrence of an abnormality of the pump, and performing a rapid pump changing operation. A step is provided at a peripheral end portion of an upper surface of a pump case to form a flange portion, and the vacuum pump comprises: an auxiliary ring attached and fit to the upper surface of the flange portion, surface of which is integrated with the upper surface of the pump case; a bolt insertion hole formed so as to pass through the upper surface and the lower surface of the auxiliary ring; a first bolt insertion hole and a second bolt insertion hole formed so as to pass through the upper surface and the lower surface of the flange portion; a bolt inserted into the bolt insertion hole of the auxiliary ring, screwed in and fixed to the lower portion opening peripheral end of a chamber positioned at the side opposing the upper surface of the pump case; a bolt inserted into the first bolt insertion hole of the flange portion, screwed in and fixed to the auxiliary ring; and a bolt inserted into the second bolt insertion hole of the flange portion, screwed in and fixed to the auxiliary ring, and a shaft diameter of which being set small as compared with the bolts and.

Claims3

Dependent claims

A vacuum pump comprising:

a pump case forming an inlet port at an upper surface;
a rotor provided rotatably in the pump case;
a rotor blade provided integrally with an outer circumferential surface of the rotor;
a stator blade positioned and arranged between the rotor blades or at the outside thereof;
and
a driving motor for rotating the rotor,
wherein a step is provided at a peripheral end portion of an upper surface of the pump case to form a flange portion, and the vacuum pump further comprises:
an auxiliary ring attached and fit to an upper surface of the flange portion, the surface of which is integrated with the upper surface of the pump case;
a bolt insertion hole formed so as to pass through an upper surface and a lower surface of the auxiliary ring;
a first bolt insertion hole and a second bolt insertion hole formed so as to pass through the upper surface and the lower surface of the flange portion;
an auxiliary ring attaching bolt inserted into the bolt insertion hole of the auxiliary ring, screwed in and fixed to the lower portion opening peripheral end of a chamber positioned at the side opposing the upper surface of the pump case;
a pump case supporting bolt inserted into the first bolt insertion hole of the flange portion, screwed in and fixed to the auxiliary ring for supporting the pump case;
and
a pump case fastening bolt inserted into the second bolt insertion hole of the flange portion, screwed in and fixed to the auxiliary ring for fixing the pump case, and a shaft diameter of which being set small as compared with the auxiliary ring attaching bolt and the pump case supporting bolt.

11 more elements

Dependencies are inferred from the claim text.