Hidden flexure ultra planar optical routing element
AssigneeNetwork Photonics, Inc.
InventorM. Adrian Michalicek
Life of this patent
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Abstract
The present invention provides improved MEMS devices and methods for use with fiber-optic communications systems. In one embodiment, an apparatus for steering light has a beam layer (160) with a reflective surface. The device uses a multi-layer electrode stack underlying the beam layer to rotate the beam layer into a desired position. Additionally, an underlying rotation and support structure provides a stable platform for the beam layer when the device is activated. In one embodiment, the underlying structure provides a multi-point landing system to maintain a generally flat beam layer upper surface when the device is activated.
Claims28
A structure for steering light, comprising:
- a base layer;
- a first conductive layer overlying a portion of said base layer;
- a flexure assembly, with a portion of said flexure assembly comprising an I-beam, said flexure assembly overlying a portion of said first conductive layer;
- and
- a beam layer overlying and coupled to said flexure assembly, said beam layer adapted to rotate relative to said base layer.
An apparatus for steering light, said apparatus comprising:
- a base layer;
- a first conductive layer overlying said base layer;
- a second conductive layer in a separate plane from said first conductive layer, each of said conductive layers comprising at least a portion thereof that is electrically coupled to at least a portion of said other conductive layer;
- and
- a beam layer coupled to a rotation device, said rotation device positioned between at least one of said conductive layers and said beam layer;
- wherein said rotation device and beam layer rotate in response to a voltage applied to said coupled portions of said first and second conductive layers.
A method of making an apparatus for steering light, said method comprising:
- providing a base layer having a first portion and a second portion;
- forming first and second stacked electrodes on said first portion and said second portion, said stacked electrodes on said first portion electrically isolated from said stacked electrodes on said second portion;
- forming a flexure assembly coupled to said base layer and electrically isolated from said first and second stacked electrodes;
- and
- forming a beam layer coupled to said flexure assembly.
Dependencies are inferred from the claim text.