Semiconductor electret capacitor microphone

Abstract

A semiconductor electret capacitor microphone including a vibration membrane 200, a semiconductor chip 100 on which are formed a necessary electronic circuit 130, a fixed electrode 110, and a spacer 120 for preserving a predetermined space between the fixed electrode 110 and the vibration membrane 200, and a case for enclosing the semiconductor chip 100 and the vibration membrane 200, in such a configuration that the fixed electrode 110 is connected to the ground and the vibration membrane 200 is connected to an input electrode 143 of the semiconductor chip 100. The vibration membrane 200 is connected to the input electrode 143 through a conductive spring cover 300 in contact with a vibration-membrane ring 210 to which the vibration membrane 200 is attached with preserved conductivity, an intermediate terminal 412C which is formed on the case 400 and which part of the spring cover comes in contact with, and a bonding wire 153, which is a connection medium for interconnecting the intermediate terminal 412C and the input electrode 143.

Dependencies are inferred from the claim text.