Optical equipment assemblies and techniques
AssigneeSeagate Technology LLC
InventorsJoseph Leigh, David S. Kuo
Life of this patent
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Abstract
A method and apparatus for detecting a topographic feature on a media is described. More particularly, a light scatter detector is coupled to an atomic force microscope. The detector is used detect scattered optical energy reflected from the surface of the media to identify the topographic feature. The atomic force microscope may then be positioned in response to the topographic feature identified.
Claims20
An apparatus for detecting a topographic pattern on a media, comprising:
- a rotatable stage;
- a support post configured to receive the media;
- an atomic force microscope coupled to the rotatable stage for movement with the rotatable stage;
- and
- a detector configured to detect scattered optical energy, the detector positioned between the atomic force microscope and the media to detect scattered optical energy from a surface of the media, the detector coupled to the atomic force microscope to allow optical energy to pass from the atomic force microscope to the surface of the media.
A method for automatically detecting position, comprising:
- providing a scatterometer coupled to an atomic force microscope;
- locating a topographic feature of a substrate assembly using the scatterometer and the atomic force microscope, the topographic feature having a feature size of approximately equal to or less than 500 nm;
- and
- automatically positioning the atomic force microscope to the topographic feature in response to locating the topographic feature.
A method for topographic alignment for scanning a surface, comprising:
- providing a scatterometer-microscope comprising a scatterometer coupled to an atomic force microscope objective lens;
- providing optical energy to the surface;
- detecting scattering of the optical energy from the surface with the scatterometer-microscope;
- identifying a topographically determined feature in response to scattered optical energy detected;
- and
- aligning the scatterometer-microscope in response to the topographical feature identified.
An apparatus for detecting a topographic pattern on a media, comprising:
- a spindle assembly configured to receive the media and to rotate the media;
- a linear actuator configured to provided linear movement radially inward to and away from the spindle assembly is provided;
- an atomic force microscope is coupled to the linear actuator and positioned proximally to the spindle assembly for scanning the media;
- and
- a detector configured to detect scattered optical energy is located between the atomic force microscope and the media to detect scattered optical energy from a surface of the media, the detector coupled to the atomic force microscope to allow optical source energy to pass from the atomic force microscope to the surface of the media.
An apparatus for detecting a topographic pattern on a media, comprising:
- atomic force microscope and detector means for detecting scattered optical energy from a surface of the media for detecting the topographic pattern thereon;
- movement means coupled to the atomic force microscope for controllably moving the media and the atomic force microscope.
Dependencies are inferred from the claim text.