Back to results
US 2002/0171952 A1Published application
Apparatus for tilting a carrier for optical elements
AssigneeCarl Zeiss SMT GmbH
InventorsUlrich Weber, Hubert Holderer, Alexander Kohl
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeCarl Zeiss SMT GmbH
InventorsUlrich Weber, Hubert Holderer, Alexander Kohl
Estimating the term…
The invention relates to an apparatus for tilting a carrier for optical elements with two optical faces which are arranged together on a carrier and are fixed at a fixed angle to one another, the carrier being fastened on a base plate via articulated connections. The carrier can be pivoted about three tilting axes, a first tilting axis preferably being located in the plane of the first optical face and extending normal to the plane of the second optical face, the second tilting axis preferably being located in the plane of the second optical face and extending normal to the plane of the first optical face, and the third tilting axis being located parallel to the line of intersection between the two planes of the optical element.
An apparatus for tilting a carrier for optical elements with two optical faces which are arranged together on a carrier and are fixed at a fixed angle to one another, the carrier being fastened on a base plate via articulated connections, wherein the carrier is arranged to pivot about three tilting axes, a first tilting axis, for tilting the first optical face, extending normal to the plane of the second optical face, the second tilting axis, for tilting the second optical face, extending normal to the plane of the first optical face, and the third tilting axis being located parallel to the line of intersection between the two planes of the optical faces.
An apparatus for tilting a carrier for a plurality of optical elements which are arranged together on a carrier and are fixed at a fixed angle to one another, the carrier being fastened on a base plate via articulated connections, wherein the carrier is arranged to pivot about a plurality of tilting axes which all run through a reference point.
Dependencies are inferred from the claim text.