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US 2002/0171902 A1Published application
System and method for canceling ringing in a MEMS device
AssigneeBandwidth 9, Inc.
InventorsBereket Berhane, Dan Guthrie, David Walker
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AssigneeBandwidth 9, Inc.
InventorsBereket Berhane, Dan Guthrie, David Walker
Estimating the term…
A Finite Impulse Response (FIR) filter for suppressing ringing in tunable, or adjustable, members of MEMS devices is described. In embodiments of the invention, the FIR filter includes staggered proportional plus delay filters, or posicast filters. The FIR filter of the present invention is applicable to an adjustable mechanical member in a MEMS device which can be modeled as single mode second order system characterized by a resonance frequency ω0 and damping constant ζ<<1, i.e., a highly underdamped, single mode, second order system.
A method of suppressing ringing in a mechanical component of an optical micro electo-mechanical switch, wherein the mechanical component has a positive damping constant substantially less than unity, the method comprising:
A method of suppressing ringing in a mechanical component of an optical micro electo-mechanical switch, wherein the mechanical component has a positive damping constant substantially less than unity, the method comprising:
An optical MEMS switch including:
Dependencies are inferred from the claim text.
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The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting element being moved or deformed by electrostatic means
Optical elements, systems or apparatus
Term end not estimated
1. Field of the Invention
This invention relates to the field of micro-electromechanical systems (MEMS). In particular, the invention relates to a system and method for canceling ringing in tunable members of MEMS devices.
2. Description of the Related Art
FIG. 1 illustrates a cantilever apparatus in a tunable semiconductor laser.
FIG. 2 illustrates the sensitivity of various types of filters to changes in resonance frequency.
FIG. 3. illustrates a step response to filtered input by various types of filters when the estimated resonance frequency deviates from the actual frequency by 15%.
A. System Overview
Micro electromechanical systems (MEMS) typically include moving components. For instance, a tunable semiconductor laser system with a movable cantilever arm is described in U.S. Pat. No. 6,181,717, entitled “Tunable Semiconductor Laser System,” inventors Peter Kner, Gabriel Li, D. Philip Worland, Rang-Chen Yu, Wupen Yuen, which is hereby incorporated by reference in its entirety.
FIG. 1 illustrates one such tunable vertical cavity surface emitting laser (VCSEL) 100 which is etched on a substrate 102 and includes a cantilever apparatus 104 with a cantilever arm 106. The cantilever apparatus 104 employs an electrostatic force which pulls on the cantilever arm 106. The mechanical deflection resulting from this electrostatic force is used to change the length of a Fabry-Perot microcavity in the laser and, consequently, the resonance wavelength of the tunable laser.