Multi-axis magnetically actuated device
AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorJonathan Jay Bernstein
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AssigneeThe Charles Stark Draper Laboratory, Inc.
InventorJonathan Jay Bernstein
Estimating the term…
A multi-axis magnetically actuated device, an array of multi-axis magnetically actuated devices, and a method of fabrication of a multi-axis magnetically actuated device are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide such as, for example, an optical fiber. The multi-axis magnetically actuated device of the invention is capable of rotational movement in two orthogonal directions. In one embodiment, the multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within an outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The inner torsional flexures define an inner axis of rotation while the outer torsional flexures define an outer axis of rotation. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. Bulk micromachining techniques enable the members to be formed from a monolithic silicon wafer and can produce a member with a smooth surface. The smooth surface of a member may function as a reflector. In one embodiment, the inner rotational member functions as a reflector.
A multi-axis magnetically actuated device comprising,
A method of actuating a multi-axis magnetically actuated device, the method comprising,
A method of fabricating a multi-axis magnetically actuated device, the method comprising,
A device comprising, a plurality of multi-axis magnetically actuated devices arranged in an array, each of the multi-axis magnetically actuated devices having,
A device comprising, an optical switch wherein the optical switch comprises at least one multi-axis magnetically actuated device having,
A multi-axis magnetically actuated device comprising,
Dependencies are inferred from the claim text.