System and method for controlling wafer temperature
AssigneeLockheed Martin Corporation
InventorThomas E. Drake JR.
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Abstract
The invention is directed to a system and method for implementing process control for temperature of a semiconductor wafer using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interferometer may be used to detect the ultrasound waves. An interpreter or analyzer may determine the temperature of the semiconductor wafer from the waves. Then, a control system may determine and implement an appropriate control action on the process.
Claims20
An apparatus for determining and implementing a control action associated with a temperature of a semiconductor wafer, the semiconductor wafer associated with a manufacturing process, the apparatus comprising:
- a first coherent electromagnetic energy source, the first coherent electromagnetic energy source producing a generator beam of coherent electromagnetic energy, the generator beam of coherent electromagnetic energy impinging the semiconductor wafer and generating a sonic energy signal about the semiconductor wafer;
- a second coherent electromagnetic energy source, the second coherent electromagnetic energy source producing a measuring beam of coherent electromagnetic energy, the measuring beam of coherent electromagnetic energy impinging the semiconductor wafer, the measuring beam of coherent electromagnetic energy reflecting from the semiconductor wafer as a scattered electromagnetic energy, the scattered electromagnetic energy having a modulation associated with the sonic energy signal;
- an interferometer, the interferometer collecting part of the scattered electromagnetic energy and deriving a signal indicative of the sonic energy signal from the scattered electromagnetic energy;
- an interpreter, the interpreter determining a characteristic associated with the temperature of the semiconductor wafer from the signal indicative of the sonic energy signal;
- and
- a controller, the controller determining a control action associated with the characteristic associated with the semiconductor wafer.
A method for determining and implementing a control action associated with a temperature of a semiconductor wafer, the semiconductor wafer associated with a manufacturing process, the method comprising:
- producing a generator beam of coherent electromagnetic energy with a first coherent electromagnetic energy source, the generator beam of coherent electromagnetic energy impinging the semiconductor wafer and generating a sonic energy signal about the semiconductor wafer;
- producing a measuring beam of coherent electromagnetic energy with a second coherent electromagnetic energy source, the measuring beam of coherent electromagnetic energy impinging the semiconductor wafer, the measuring beam of coherent electromagnetic energy reflecting from the semiconductor wafer as a scattered electromagnetic energy, the scattered electromagnetic energy having a modulation associated with the sonic energy signal;
- collecting part of the scattered electromagnetic energy with an interferometer;
- deriving a signal indicative of the sonic energy signal from the scattered electromagnetic energy;
- determining with an interpreter a characteristic associated with the temperature of the semiconductor wafer from the signal indicative of the sonic energy signal;
- and
- determining with a controller a control action associated with the characteristic associated with the temperature of the semiconductor wafer.
A control system for controlling a temperature associated with a semiconductor wafer in a manufacturing process based on a characteristic associated with the temperature associated with the semiconductor wafer, an interferometer producing a signal associated with a sonic energy signal, the sonic energy signal being associated with the characteristic associated with the temperature associated with the semiconductor wafer, the control system comprising:
- an analyzer, the analyzer deriving a value associated with the characteristic associated with the temperature associated with the semiconductor wafer, the analyzer deriving the value from the signal associated with the sonic energy signal;
- and
- a controller, the controller determining a control action associated with the characteristic, the controller implementing the control action on the manufacturing process.
Dependencies are inferred from the claim text.