Production method of thin film passive element formed on printed circuit board and thin film passive element produced by the method

Abstract

The present invention provides a thin film capacitance element having minimal deviation of capacitance value in a high accuracy formed on a printed circuit board (core material). The thin film capacitance element formed on a printed circuit board is composed of a lower electrode layer formed on the printed circuit board through an insulation layer, a dielectric layer formed on the lower electrode layer, an upper electrode layer formed on the dielectric layer and an electric pad for leading out the lower electrode layer, wherein the lower electrode layer is longer than the upper electrode layer in the horizontal direction and connected to the electric pad for leading out the lower electrode layer outside, and wherein the top surface of the upper electrode layer and the top surface of the electric pad for leading out the lower electrode layer are formed substantially in the same height.

Dependencies are inferred from the claim text.