Torsion spring for electro-mechanical switches and a cantilever-type RF micro-electromechanical switch incorporating the torsion spring

A micro-electro-mechanical switch comprising:

• a substrate;
• an input line on top of the substrate;
• an output line on top of the substrate and separated from the input
• line;
• a substrate electrode on top of the substrate, located near but separated from the input line and the output line;
• and
• an armature comprising:
• a first beam structural layer having a first end mechanically connected with the substrate and a second end including a set of tines including at least one tine with a terminus portion rotatably suspended therefrom, with the terminus portion including a conducting transmission line positioned over the input and output lines, with the at least a portion of the conducting transmission line exposed for conformal contact with the input and output lines;
• and
• an armature electrode positioned directly above the substrate electrode and suspended on the armature;
• an insulating layer positioned between the armature electrode and the substrate electrode to prevent short-circuiting therebetween;
• whereby when the switch is actuated into a “closed” position, the terminus portion is free to rotate to ensure a conformal contact between the exposed portion of the conducting transmission line and the input and output lines in order to form a circuit therebetween to permit the flow of electricity.

An armature for a micro-electro-mechanical switch having a torsion spring, the armature comprising:

• a first beam structural layer having a first end for mechanically connecting with a substrate of a micro-electro-mechanical switch and a second end including a set of tines including at least one tine with a terminus portion rotatably suspended therefrom, with the terminus portion including a conducting transmission line configured to be positioned over the input and output lines of a micro-electro-mechanical switch, with the at least a portion of the conducting transmission line exposed for conformal contact with the input and output lines;
• and
• an armature electrode positioned directly above a substrate electrode of the micro-electro-mechanical switch and suspended on the armature;
• an insulating layer positioned between the armature electrode and the substrate electrode to prevent short-circuiting therebetween when the armature is assembled in a micro-electro-mechanical switch and actuated;
• whereby when the armature is assembled in a micro-electro-mechanical switch is actuated into a “closed” position, the terminus is free to rotate to ensure a conformal contact between the exposed portion of the conducting transmission line and the input and output lines in order to form a circuit therebetween to permit the flow of electricity.