Impedance detection circuit, impedance detector and method of impedance detection
AssigneeTokyo Electron Limited
InventorsMasami Yakabe, Toshiyuki Matsumoto, Yoshihiro Hirota, Kouichi Nakano
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AssigneeTokyo Electron Limited
InventorsMasami Yakabe, Toshiyuki Matsumoto, Yoshihiro Hirota, Kouichi Nakano
Estimating the term…
A second operational amplifier (11) of a core unit (1) shorts an inverting input terminal and an output terminal. A signal line (19) is connected to a non-inverting input terminal. A capacitive sensor (18) is connected to the signal line (19). A first operational amplifier (12) earths the non-inverting input terminal. One end of a first resistance (15) and one end of a second resistance (16) are respectively connected to the inverting input terminal. The other end of the first resistance (15) is connected to an alternate current voltage generator (14). The other end of the second resistance (16) is connected to the output terminal of the first operational amplifier (11). A signal output terminal (21) of the core unit (1) is connected to an inverting amplification device (2). An alternate output terminal (22) of the core unit (1) and an inverting output terminal (42) of the inverting amplification device (2) are connected to an addition device (3). The non-inverting input terminal of operational amplifiers (36) and (40).
An impedance detection circuit comprising:
An impedance detection circuit comprising:
An impedance detection method including steps for,
An impedance detection method including steps for:
Dependencies are inferred from the claim text.