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US 2002/0171414 A1Published application
Method for optimizing probe card analysis and scrub mark analysis data
AssigneeApplied Precision, LLC, a Washington corporation
InventorJohn Strom
Life of this patent
Estimating the term…
Abstract
A method for quantitatively determining probe card errors relying on merging data sets from a probe card analysis machine and a scrub mark analysis machine. Minimizing error values related to the data sets provides an indication of probe card/probe machine combination tolerance.
Claims14
A method for quantifying a misalignment of probe pin tips on a probe card and prober machine combination, comprising the steps of:
- measuring a plurality of scrub patterns of probe card pins on a probe card analyzer and defining a probe card analyzer data set;
- impressing the probe card pins with a prober machine on a test wafer having a pin contact surface resembling semiconductor bonding pads and measuring a plurality of scrub marks on the contact surface with a scrub mark analyzer machine and defining a scrub mark analyzer data set;
- merging the probe card analyzer data set and the scrub mark analyzer data set to generate a merged data set, and
- optimizing, mathematically, the merged data set by minimizing errors and quantifying misalignment of probe pins in the probe card and prober machine combination.
1 more element
Dependencies are inferred from the claim text.