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AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsTetsuro Otsuchi, Masato Sugimoto, Tetsuyoshi Ogura, Yoshihiro Tomita, Osamu Kawasaki
Estimating the term…
A small acceleration sensor which is highly sensitive over a large frequency region and which varies little in characteristics such as sensitivity. A piezoelectric element is formed by connecting two main faces of rectangular LiNbO3 piezoelectric substrates, in which the polarization axes are directed oppositely. Supporters comprising LiNbO3 are directly connected to one end of the piezoelectric element. Electrodes of chromium-gold being 0.2 μm thick are successively connected to the two main faces of the piezoelectric element and to the supporters, thus to produce a cantilever structure bimorph electromechanical transducer.
An acceleration sensor which comprises an electromechanical transducer having a piezoelectric element formed by directly connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, and supporters to support the electromechanical transducer.
An acceleration sensor which comprises an electromechanical transducer having a piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the two opposite main faces, and supporters to support the electromechanical transducer, where the electromechanical transducer is directly connected to the supporters.
An acceleration sensor which comprises an electromechanical transducer having a piezoelectric element formed by directly connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the two opposite main faces, supporters to support the electromechanical transducer, and packages containing the electromechanical transducer, where the supporters are directly connected to the packages.
An acceleration sensor which comprises an electromechanical transducer having a piezoelectric element formed by directly connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the two opposite main faces, supporters to support the electromechanical transducer, and packages containing the electromechanical transducer, where the electromechanical transducer is supported by directly connecting the piezoelectric substrates comprising the piezoelectric element to the packages.
An acceleration sensor which comprises an electromechanical transducer having a piezoelectric element formed by directly connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the two opposite main faces, supporters to support the electromechanical transducer, and packages comprising at least two parts to contain the electromechanical transducer, where the two parts comprising packages are directly connected to each other.
A method for producing an acceleration sensor comprising an electromechanical transducer having piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, and supporters to support the electromechanical transducer, wherein the piezoelectric element is formed by directly connecting the main faces of the two piezoelectric substrates.
A method for producing an acceleration sensor comprising an electromechanical transducer having piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, and supporters to support the electromechanical transducer, wherein the supporters are directly connected to the piezoelectric substrates composing the piezoelectric element.
A method for producing an acceleration sensor comprising an electromechanical transducer having piezoelectric element formed by connecting opposing main faces of at least two piezoelectric substrates and electrodes formed on the opposing main faces of the piezoelectric element, supporters to support the electromechanical transducer, and packages to contain the electromechanical transducer, wherein the supporters are directly connected to the package.
A method for producing an acceleration sensor comprising an electromechanical transducer having piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, and packages to contain the electromechanical transducer, wherein the piezoelectric substrates composing the piezoelectric element are directly connected to the packages.
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, supporters to support the electromechanical transducer, and packages comprising at least two parts to contain the electromechanical transducer, wherein the parts of the packages are directly connected to each other.
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, and packages to contain the electromechanical transducer, the method comprising the following steps:
A method for producing an acceleration sensor comprising an electromechanical transducer having a piezoelectric element formed by connecting two opposite main faces of at least two piezoelectric substrates and electrodes formed on the opposite main faces of the piezoelectric element, and packages to contain the electromechanical transducer, the method comprising the following steps:
A shock detecting device comprising:
Dependencies are inferred from the claim text.