Use of standoffs to protect atomic resolution storage mover for out-of-plane motion
AssigneeHewlett-Packard Development Company, L.P.
InventorPeter G. Hartwell
Life of this patent
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Abstract
A micro-machined actuator for use in, among other things, sensors and data storage devices. The actuator includes a stator wafer and a micro-mover positioned adjacent to the stator wafer. Between the stator wafer and the micro-mover are electrodes that are set to specified voltages and that emanate electric fields that position the micro-mover relative to the stator wafer. Also between stator wafer and the micro-mover are bumpers that prevent the electrodes from coming into contact with each other.
Claims20
An actuator comprising:
- a stator wafer;
- a first stator electrode protruding from a first surface of the stator wafer;
- a micro-mover above the first surface of the stator wafer;
- a first actuator electrode protruding from a first surface of the micro-mover, wherein the first surface of the micro-mover and the first surface of the stator wafer face each other;
- and
- a first bumper positioned between the stator wafer and the micro-mover.
A method of operating an actuator comprising:
- providing a stator wafer and a micro-mover over the stator wafer;
- forming stator electrodes on the stator wafer and actuator electrodes on the micro-mover;
- moving the micro-mover relative to the actuator electrodes by altering the voltages of selected stator electrodes over time;
- and
- preventing physical contact between the stator electrodes and actuator electrodes.
A method of manufacturing an actuator comprising:
- providing a stator wafer with stator electrodes on a first surface of the stator wafer;
- providing a micro-mover with actuator electrodes on a first surface of the micro-mover;
- positioning the first surface of the micro-mover facing the first surface of the stator wafer;
- and
- providing a bumper between the stator wafer and the micro-mover.
Dependencies are inferred from the claim text.