Flip-chip-type semiconductor device and manufacturing method thereof
AssigneeNEC Corporation
InventorTakashi Miyazaki
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AssigneeNEC Corporation
InventorTakashi Miyazaki
Estimating the term…
There are provided a flip-chip-type semiconductor device and a manufacturing method thereof that can sufficiently reduce stress generated in the connecting portions between a semiconductor chip and a mounting substrate, and can achieve excellent mounting reliability. A pad electrode is selectively formed on the surface of a semiconductor chip, conductive post including at least two conductive layers, which have different materials each other, on the pad electrode, and bump electrode is formed on the conductive post. The bump electrode is connected to a mounting substrate, and the pad electrode is electrically connected to the mounting substrate. The conductive post is formed by forming first conductive layer and second conductive layer on the first conductive layer selectively on a base material (temporary substrate), electrically connecting the first and second conductive layers to the pad electrode, and thereafter separating the temporary substrate from the first conductive layer.
A semiconductor device comprising:
A semiconductor device comprising a semiconductor chip, a plurality of pad electrodes formed on said semiconductor chip, a plurality of bump electrodes, and a plurality of conductive posts each intervening between an associated one of said electrode pads and an associated one of said bump electrodes to form an electrical path therebetween, each of said conductive posts including a first conductive layer and a second conductive later that is bulged to have an area which is larger in plan view than an area of said first conductive layer.
A semiconductor device comprising a semiconductor chip, a plurality of pad electrodes formed on said semiconductor chip, a plurality of bump electrodes, and a plurality of conductive posts each intervening between an associated one of said electrode pads and an associated one of said bump electrodes to form an electrical path therebetween, each of said conductive posts including a first solder layer and a first metal layer.
Dependencies are inferred from the claim text.