Image classification method, obervation method, and apparatus thereof

An image classification method comprising the steps of:

• deciding order of positions to be observed on a substrate based on first positional information of a first region being formed with a pattern with a defect to be observed and second positional information of a second region being formed with a pattern of originally the same shape as that of the first region on the substrate;
• deciding moving velocity of said stage with said substrate placed thereon so that the position to be observed on the substrate is placed into observation visual field of observation means in accordance with the decided order and moving velocity of said stage when the position to be observed on the substrate is observed in said observation visual field;
• controlling movement of the stage in accordance with the decided stage moving velocity;
• acquiring an image of the position to be observed by imaging the position to be observed on the substrate placed into the observation visual field of said observation means while moving the controlled stage;
• and
• classifying the image acquired by imaging.

An image classification method comprising the steps of:

• placing a location to be observed into an observation visual field by moving a stage with a sample based on positional information of said location to be observed on the sample;
• acquiring an image of said location to be observed by imaging the location to be observed in state of that the location to be observed is placed into said observation visual field while moving said stage;
• classifying the acquired image;
• and
• storing the classified image.

An image classification method comprising the steps of:

• detecting a plurality of defects by observing a sample at a first magnification;
• storing positional information of the plurality of detected defects;
• observing sequentially a desired plurality of defects in said stored plurality of the defect at a second magnification higher than said first magnification by moving said sample sequentially based on the stored positional information of the plurality of the defects;
• and
• classifying the observed desired defects;
• wherein when said plurality of the desired defects are sequentially observed at said second magnification, said sample continues to move.

A method for observing a sample comprising the steps of:

• setting order to move the sample at a first velocity so that a plurality of locations on said sample are sequentially placed into an imaging visual field;
• moving said sample to said imaging visual field at the first velocity so that the plurality of locations on said sample are sequentially placed into the imaging visual field in accordance with the set order;
• and
• acquiring an image by imaging the location placed into said imaging visual field in said plurality of locations while moving said sample at a second velocity.

An apparatus for observing a sample comprising:

• a stage unit which has a stage placed the sample thereon for movement;
• a position detector which detects position of the stage;
• a scanning electron microscope unit which acquires an electron beam image of surface of said sample by irradiating and scanning an electron beam focused onto the sample placed on said stage;
• a control unit which controls the movement of said stage and a range to be scanned by irradiating the electron beam of said scanning electron microscope unit based on positional information of said stage detected by said position detector and positional information of a plurality of locations to be observed on said sample;
• an image classification unit which classifies the electron beam image of the surface of said sample acquired by said scanning electron microscope unit;
• and
• wherein the control unit controls said stage unit so that moving velocity of said stage when the plurality of locations to be observed on said sample are moved so as to sequentially be placed into imaging visual field of said scanning electron microscope unit is higher than moving velocity of said stage when location to be observed on said sample is moved in the imaging visual field of said scanning electron microscope unit.

An apparatus for observing a sample comprising:

• a defect detection unit which detects a plurality of defects by observing the sample at a first magnification;
• a storing unit which stores positional information of the plurality of defects detected by the defect detection unit;
• an observation unit which observes said sample at a second magnification higher than said first magnification based on the positional information of the plurality of defects stored into the storing unit;
• and
• wherein said observation unit sequentially observes said plurality of defects without stopping movement of said sample when said plurality of defects are observed at said second magnification.

An apparatus for observing a sample comprising:

• an imaging unit which images a desired location on the sample;
• a movement order setting unit which sets order to move said sample so that a plurality of desired locations on the sample are sequentially placed into an imaging visual field of said imaging unit;
• a table unit which moves said sample so that the plurality of desired locations on said sample are sequentially placed into an imaging visual field of said imaging unit in accordance with the order set by the movement order setting unit;
• and
• a control unit which controls moving velocity of said table unit to be changed when the sample is moved so that the plurality of desired locations on said sample are sequentially placed into the imaging visual field of said imaging unit and when said location placed into the imaging visual field is imaged by said imaging unit.