Gas injector in which one of a plurality of nozzles can be selectively driven for elevation
AssigneeSeiko Instruments Inc.
InventorYoshihiro Koyama
Life of this patent
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Abstract
In a gas injector according to the invention, a forward section of the same is formed by a cylindrical portion which collectively contains and holds a plurality of nozzles and gas supply pipes and a nozzle guide portion which has an opening of a size to allow only one of the nozzles to protrude outwardly at an end thereof and which is formed like a taper extending from said cylindrical portion to said opening, and a rear section of the gas injector has a mechanism capable of selectively driving said plurality of nozzles for elevation through said gas supply pipes.
Claims5
A gas injector of a focused ion beam apparatus comprising:
- a plurality of nozzles and gas supply pipes;
- a cylindrical member collectively containing the plurality of nozzles and gas supply pipes and having a nozzle guide portion which has an opening of a size to allow only one of the nozzles to protrude outwardly at an end thereof and is formed like a taper extending from said cylindrical portion to said opening;
- and
- a mechanism capable of selectively driving said plurality of nozzles for elevation through said gas supply pipes.
A gas injector of a focused ion beam apparatus comprising:
- a plurality of gas supply pipes with a nozzle at each end;
- a cylindrical member which accommodates the gas supply pipes and has a nozzle guide portion, the nozzle guide portion having an opening of a size to allow only one of the nozzles to protrude outwardly at an end thereof and being formed like a taper extending from said cylindrical portion to said opening;
- and
- a driving mechanism which selectively drives a desired one to protrude out of the opening.
Dependencies are inferred from the claim text.